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28 April 2014

Cleaning Wafer - New Product

Posted in What's New

Cleaning Wafer - New Product

The Nitto Cleaning Wafer removes particles from electrostatic and vacuum wafer chucks without a costly shutdown of the Fab tool. A patented coating attaches particles to the wafer and removes them from the tool. Captured particles can be examined to assist with preventative measures. The Cleaning Wafer can also prevent particles from accumulating with regular use.

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